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14 results

Conference Proceedings

1. Advances in High Power Pulse Reactive Magnetron Sputtering

R. Chistyakov ; B. Abraham ; W.D. Sproul

Pub. info.:	49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.. pp.88-94, 2006. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	49

Conference Proceedings

2. Advances in Thin Film Technology through the Application of Modulated Pulse Power Sputtering

B. Mishra ; J.J. Moore ; J.L. Lin ; W.D. Sproul

Pub. info.:	THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009. pp.208-213, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	638-642

Conference Proceedings

3. Integrated Process Control for Reactive Sputter Deposition of Dielectric Thin Films

D. Carter ; W.D. Sproul ; D. Christie

Pub. info.:	46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California. pp.23-28, 2003. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	46

Conference Proceedings

4. Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering

B.M. DeKoven ; P.R. Ward ; R.E. Weiss ; D.J. Christie ; R.A. Scholl ; W.D. Sproul ; F. Tomasel ; A. Anders

Pub. info.:	46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California. pp.158-168, 2003. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	46

Conference Proceedings

5. Control of the Reactive Sputtering Process Using Two Reactive Gases

W.D. Sproul ; D.J. Christie ; D.C. Carter ; S. Berg ; T. Nyberg

Pub. info.:	46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California. pp.98-103, 2003. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	46

Conference Proceedings

6. Mid-Frequency Dual Magnetron Reactive Co-Sputtering for Deposition of Customized Index Optical Films

D.J. Christie ; W.D. Sproul ; D. Carter

Pub. info.:	46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California. pp.393-398, 2003. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	46

Conference Proceedings

7. Modulated Pulse Power Deposition of Multilayered Coatings

S. Camphausen ; R. Chistyakov ; B. Abraham ; W.D. Sproul ; J.J. Moore ; J. Lin

Pub. info.:	51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL. pp.313-316, 2008. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	51

Conference Proceedings

8. High Power Pulse Reactive Sputtering of TiO₂

J.A. Davis ; W.D. Sproul ; D.J. Christie ; M. Geisler

Pub. info.:	47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas. pp.215-218, 2004. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	47

Conference Proceedings

9. Multi-Level Control for Reactive Sputtering

W.D. Sproul ; B.E. Sylvia

Pub. info.:	45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida. pp.11-15, 2002. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	45

10.

Conference Proceedings

10. A Novel Pulsed Supply With Arc Handling and Leading Edge Control as Enabling Technology for High Power Pulsed Magnetron Sputtering (HPPMS)

D.J. Christie ; W.D. Sproul ; D.C. Carter ; F. Tomasel

Pub. info.:	47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas. pp.113-118, 2004. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	47

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Author: W.D. Sproul