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14 results

Conference Proceedings

1. Device and Process Technology Requirements for Next-Generation, Ultra-High- Performance Poly-Si TFTs

Voutsas, A.T.

Pub. info.:	Thin Film Transistor Technologies VI : proceedings of the international symposium. pp.109-118, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-23

Conference Proceedings

2. The Effect of Oxygen Incorporation in ELA Poly-SI Films and Its Relation to Poly-Si TFT Device Performance

Voutsas, A.T. ; Marmorstein, A. ; Solanki, R.

Pub. info.:	Proceedings of the fourth Symposium on Thin Film Transistor Technologies. pp.43-50, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-22

Conference Proceedings

3. hin Film Transistors Fabricated at Low Thermal Budgets in Various Types of Polycrystalline Silicon Films on Glass Substrates P

Kouvatsos, P.N. ; Voutsas, A.T. ; Hatalis, M.K.

Pub. info.:	Proceedings of the fourth Symposium on Thin Film Transistor Technologies. pp.309-315, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-22

Conference Proceedings

4. A Novel Low-Temperature LPCVD Process for Deposition of Polysilicon Films on Glass Substrates

Voutsas, A.T. ; Hatalis, M.K.

Pub. info.:	Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition. pp.178-184, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-2

Conference Proceedings

5. An Investigation of the Electrically Active Defects in poly-Si Thin Film Transistors

Exarchos, M. ; Papaioannou, G.J. ; Kouvatsos, D.N. ; Voutsas, A.T.

Pub. info.:	Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium. pp.125-129, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-15

Conference Proceedings

6. High Density Plasma Processing of Microcrystalline Si Thin Films

Joshi, P.C. ; Voutsas, A.T. ; Hartzell, J.W.

Pub. info.:	Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.93-98, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	862

Conference Proceedings

7. High Density Plasma Growth of Thermal Quality SiO2 Thin Films

Joshi, P.C. ; Ono, Y. ; Voutsas, A.T. ; Hartzell, J.W.

Pub. info.:	Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.124-135, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-01

Conference Proceedings

8. Low-temperature processing of SiO2 thin films by HD-PECVD technique for gate dielectric applications

Joshi, P.C. ; Moriguchi, M. ; Crowder, M.A. ; Droes, S.R.T. ; Flores, J.S. ; Voutsas, A.T. ; Hartzell, J.W.

Pub. info.:	Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas. pp.105-112, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5004

Conference Proceedings

9. Location-controlled crystallization of Si films for TFT circuitapplications

Crowder, M.A. ; Voutsas, A.T. ; Droes, S.R.T. ; Moriguchi, M. ; Mitani, Y.

Pub. info.:	Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas. pp.77-83, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5004

10.

Conference Proceedings

10. TFT threshold voltage adjustment with in-situ doped PVD silicon films

Droes, S.R.T. ; Atkinson, M.M. ; Guthrie, P.R. ; Crowder, M.A. ; Voutsas, A.T.

Pub. info.:	Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas. pp.95-104, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5004

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Author: Voutsas, A.T.