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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.468-489, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.3-17, 1997. Pennington, NJ. Electrochemical Society
Porrini, M. ; Pretto, M.G. ; Scala, R. ; Voronkov, V.V.
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Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.75-82, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
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Porrini, M. ; Pretto, M.G. ; Scala, R. ; Voronkov, V.V.
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Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.75-82, 2003. Pennington, NJ. Electrochemical Society
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