1.

Conference Proceedings
Conference Proceedings
1. Design and performance of a step and repeat imprinting machine
McMackin, I. ; Schumaker, P. ; Babbs, D. ; Choi, J. ; Collison, W. ; Sreenivasan, S.V. ; Schumaker, N.E. ; Watts, M.P.C. ; Voisin, R.D.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.178-186,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of Step and Flash imprint lithography templates using commercial mask processes
Thompson, E. ; Rhyins, P.D. ; Voisin, R.D. ; Sreenivasan, S.V. ; Martin, P.M.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.1019-1028,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037