Brillson, L. J. ; Vitomirov, I. M. ; Raisanen, A. ; Chang, S ; Viturro, R. E. ; Kirchner, P. D. ; Pettit, G. D. ; Woodall, J. M.
Pub. info.:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.449-456, 1992. Pittsburgh, Pa.. Materials Research Society