1.

Conference Proceedings
Conference Proceedings
1. Low Temperature Selective Silicon Epitaxy Using Si2H6, H2 and Cl2 in Ultra High Vacuum Rapid Thermal Chemical Vapor Deposition
Violette, Katherine E. ; Ozturk, Mehmet C. ; O'Neil, Patricia A. ; Christensen, Kim ; Maher, Dennis M.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.335-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
2.

Conference Proceedings
Conference Proceedings
2. Extending the Use of NO Dielectrics for DRAM by Ultrathin Silicon Nitride RTCVD With In Situ Ammonia and Hydrogen Predeposition Surface Conditioning
Tiner, Paul A. ; Khamankar, Rajesh B. ; Johnston, Clark D. ; Park, Song C. ; Pas, Michael F. ; Violette, Katherine E. ; Wise, Rick L.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.387-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
3.

Conference Proceedings
Conference Proceedings
3. NUCLEATION AND GROWTH OF POLYCRYSTALLINE SILICON FILMS IN AN ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE AND HYDROGEN
Violette, Katherine E. ; Ozturk, Mehmet ; Harris, Gari ; Sanganeria, Mahesh K. ; Lee, Archie ; Maher, Dennis M.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.673-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
4.

Conference Proceedings
Conference Proceedings
4. Facet Free Selective Silicon Epitaxy by Rapid Thermal Chemical Vapor Deposition
Violette, Katherine E. ; Wise, Rick ; Chao, Chih-Ping ; Unnikrishnan, Sreenath
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.289-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
5.

Conference Proceedings
Conference Proceedings
5. Low Temperature Selective Si Epitaxy Using Si2H6 and Cl2: Investigations into Selectivity Robustness and Epitaxial Film Quality
O'Neil, Patricia A. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Batchelor, Dale ; Maher, Dennis M.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.355-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
6.

Conference Proceedings
Conference Proceedings
6. CLEANING DURING INITIAL STAGES OF EPITAXIAL GROWTH IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR
Sanganeria, Mahesh K. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Harris, Gari ; Lee, C. Archie ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.463-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
7.

Conference Proceedings
Conference Proceedings
7. SILICON NUCLEATION ON SILICON DIOXIDE AND SELECTIVE EPITAXY IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE IN HYDROGEN
Violette, Katherine E. ; Sanganeria, Mahesh K. ; Ozturk, Mehmet C. ; Harris, Gari ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.519-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
8.

Conference Proceedings
Conference Proceedings
8. Formation of Ultra-Shallow Junctions in Silicon by Rapid Thermal Vapor Phase Doping in an Ultrahigh Vacuum Rapid Thermal Processing System
O'Neil, Patricia A. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Ivanov, Igor C.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.395-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387