1.

Conference Proceedings
Conference Proceedings
1. Influence of Hydrogen Plasma Treatment on He Implantation-Induced Nanocavities in Silicon
Vengurlekar, A. ; Ashok, S. ; Liu, C.L. ; Ntsoenzok, E. ; Barthe, M.F. ; Desgardin, P. ; Ruault, M.O.
Pub. info.: Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.183-188,  2004.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 792
2.

Conference Proceedings
Conference Proceedings
2. Enhancement of Boron Activation in Shallow Junctions by Hydrogen
Vengurlekar, A. ; Ashok, S. ; Kalnas, C.E. ; Theodore, N.D.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.325-332,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
3.

Conference Proceedings
Conference Proceedings
3. Mechanism of Dopant Activation Enhancement in Shallow Junctions by Hydrogen
Vengurlekar, A. ; Ashok, S. ; Kalnas, Christine E. ; Ye, Win
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.515-521,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
4.

Conference Proceedings
Conference Proceedings
4. Influence of Atomic Hydrogen on Nickel Silicide Formation
Vengurlekar, A. ; Balasubramanian, Satheesh ; Ashok, S. ; Theodore, N.D. ; Chi, D.Z.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.159-164,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
5.

Conference Proceedings
Conference Proceedings
5. Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon
Alquier, D. ; Ntsoeazok, E. ; Liu, C.L. ; Vengurlekar, A. ; Ashok, S.
Pub. info.: Hydrogen in semiconductors : symposium held April 13-14, 2004, San Francisco, California, U.S.A..  pp.55-60,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 813