1.

Conference Proceedings
Conference Proceedings
1. Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning
Rettig, C. L. ; Khodykin, O. V. ; Hoffman, J. R. ; Marx, W. F. ; Bowering, N. R. ; Vargas, E. ; Ershov, A. I. ; Fomenkov, I. V. ; Partlo, W. N.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.330-339,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
2.

Conference Proceedings
Conference Proceedings
2. LPP EUV source developmentfor HVM [6151-26]
Hansson, B. A. M. ; Fomenkov, I. V. ; Bowering, N. R. ; Ershov, A.. I. ; Partio, W. N ; Myers, D. W. ; Khodykin,O.V. ; Bykanov,A.N. ; Rettig,C.L. ; Hoffman,J. R. ; Vargas, E. ; Simmons, L. R. D. ; Chavez. J. A, ; Marx, W. F ; Brandt, D. C.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510R-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
3.

Conference Proceedings
Conference Proceedings
3. High-power low cost drive laser for LPP source [6151-137]
Fomenkov, I V. ; Hanssaon, B. A. M. ; Boering, N. R. ; Ershov, A. I. ; Partlo, W. N. ; Fleurov, V. B. ; Khodykin, O. V. ; Bykanov, A. N. ; Rettig, C. L. ; Hoffman,J.R. ; Vargas, E. ; Chavez,L,J.A. ; Marx,W.F. ; Brant, D. C.
Pub. info.: Emerging Lithographic Technologies X.  pp.61513X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151