1.

Conference Proceedings
Conference Proceedings
1. THE REMOVAL OF ORGANIC CONTAMINATION BY 03/DI-WATER PROCESSES: A THEORETICAL STUDY
De Smedt, F. ; Vankerckhoven, H. ; Vinckier, C. ; De Gendt, S. ; Claes, M. ; Heyns., M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.54-60,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
2.

Conference Proceedings
Conference Proceedings
2. REMOVAL OF PHOTORESIST BY 03 DI-WATER PROCESSES: DETERMINATION OF DEGRADATION PRODUCTS
Vankerckhoven, H. ; De Smedt, F. ; Vinckier, C. ; Van Herp, B. ; Claes, M. ; De Gendt, S. ; Heyns, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.77-84,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26