1.

Conference Proceedings
Conference Proceedings
1. XPS-ANALYSIS OF ION-BEAM-INDUCED OXIDATION (IBO) OF AlXGa1-XAs SUBSTRATES
Alay, Josep-Lluis ; Vandervorst, Wilfried
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.619-624,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Segregation of Cu on Etched and Non-Etched Al(Cu) Surface
Li, Hua ; Maex, Karen ; Brijs, Bert ; Conard, Thierry ; Vandervorst, Wilfried ; Baklanov, Michael ; Boullart, Werner ; Froyen, Ludo
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.77-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516
3.

Conference Proceedings
Conference Proceedings
3. Comparative Growth Kinetics of SiGe in a Commercial Reduced Pressure Chemical Vapor Deposition EPI Reactor and Anomalies During Growth of Thin Si Layers on SiGe
Caymax, Matty ; Loo, Roger ; Brijs, Bert ; Vandervorst, Wilfried ; Howard, David J. ; Kimura, Kenji ; Nakajima, Kaoru
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.339-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
4.

Conference Proceedings
Conference Proceedings
4. Ge Island Evolution During Growth, In Situ Anneal, and Si Capping in an Industrial CVD Reactor
Loo, Roger ; Meunier-Beillard, Philippe ; Dentel, Didier ; Goryll, Michael ; Vanhaeren, Danielle ; Vescan, Lili ; Bender, Hugo ; Caymax, Matty ; Vandervorst, Wilfried
Pub. info.: Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 664
5.

Conference Proceedings
Conference Proceedings
5. Electrical Activity of B and As Segregated at the Si-SiO2 Interface
Fruhauf, Jens ; Lindsay, Richard ; Bergmaier, Andreas ; Vandervorst, Wilfried ; Tempel, Georg ; Maex, Karen ; Dollinger, Gunther ; Koch, Frederick
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.115-120,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717