1.

Conference Proceedings
Conference Proceedings
1. 13 The role of fluorine with Ge pre-amorphization in forming pMOS junctions for the 65-nm CMOS technology node
Pawlak, B.J ; Lindsay, R. ; Surdeanu, R. ; Pages, X. ; Vandervorsi, W. ; Jeugd, K. v. d.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.99-104,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings
Conference Proceedings
2. Recent Developments in Nuclear Methods in Support of Semiconductor Characterization
Brijs, B. ; Bender, H. ; Huyghebaert, C. ; Janssens, T. ; Vandervorsi, W. ; Nakajima, K. ; Kimura, K. ; Bergmaier, A. ; Dollinger, G. ; van den Berg, J.A.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.50-62,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3