1.

Conference Proceedings
Conference Proceedings
1. Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures
Walecki, W. ; Wei, F. ; Van, P. ; Lai, K. ; Lee, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS III.  pp.55-62,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5343
2.

Conference Proceedings
Conference Proceedings
2. Low-coherence interferometric absolute distance gauge for study of MEMS structures
Walecki, W.J. ; Lai, K. ; Pravdivtsev, A. ; Souchkov, V. ; Van, P. ; Azfar, T. ; Wong, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV.  pp.182-188,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5716