1.

Conference Proceedings
Conference Proceedings
1. Porous SiOCH Modification Studies Induced by Ashing Processes
Posseme, N. ; Chevolleau, T. ; Valuer, L. ; Joubert, O.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.66-72,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
2.

Conference Proceedings
Conference Proceedings
2. Resist Transformation during Etching Steps Involved in Patterning Low-k Dielectric Materials: Impact on Process Control
Pargon, E. ; Joubert, O. ; Posseme, N ; Valuer, L.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.47-58,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
3.

Conference Proceedings
Conference Proceedings
3. Etching of Low-k Interconnect Materials for Next Generation Devices
Chevolleau, T. ; Joubert, O. ; Posseme, N. ; Valuer, L. ; Thomas-Boutherin, I.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.40-46,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
4.

Conference Proceedings
Conference Proceedings
4. ETCHING OF SILICON NATIVE OXIDE USING ULTR-SLOW MULTICHARGED Arq+ IONS
Le Roux, V. ; Machicoane, G. ; Borsoni, G. ; Korwin-Pawlowski, M. ; Bechu, N. ; Kerdiles, S. ; Laffitte, R. ; Valuer, L. ; Roman, P. ; Wu, C.-T. ; Ruzyllo, J.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.249-257,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26