1.

Conference Proceedings
Conference Proceedings
1. Niobium Nitride Film Growth by Plasma CVD
Yu, A. ; Grigori, G. ; Vajenine, V.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.730-732,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Synthesis of molybdenum nitrides by plasma enhanced chemical vapor deposition
Ganin, A. Y. ; Kienle, L. ; Vajenine, V.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.449-456,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09