1.

Conference Proceedings
Conference Proceedings
1. Comparative analysis of silicon wafers micromachining versus nonconventional technology
Ulieru,D.Gh.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.371-377,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Noncontact laser speckle sensor for measuring one- and two-dimensional angular displacement
Ulieru,D.Gh.
Pub. info.: Optical measurement systems for industrial inspection II : application in industrial design : 18-19 June 2001 Munch, Germany.  pp.289-295,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4398
3.

Conference Proceedings
Conference Proceedings
3. In-line monitoring of process-induced damage through chemical contamination in microelectronic manufacturing
Ulieru,D.Gh.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.150-156,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
4.

Conference Proceedings
Conference Proceedings
4. Laser diode applications for contamination control in microelectronics fabrication processes
Ulieru,D.Gh.
Pub. info.: Testing, packaging, reliability, and applications of semiconductor lasers IV : 28 January 1999, San Jose, California.  pp.28-39,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3626
5.

Conference Proceedings
Conference Proceedings
5. Use of nonscanning coherence radar for distance measurement
Ulieru,D.Gh.
Pub. info.: Laser radar technology and applications IV : 6-9 April 1999, Orlando, Florida and 16 June 1999, Munich, Germany.  pp.336-341,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3707
6.

Conference Proceedings
Conference Proceedings
6. Oxide degradation and charging damage by dry etch processing
Ulieru,D.Gh.
Pub. info.: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.241-248,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3743
7.

Conference Proceedings
Conference Proceedings
7. Application of fiber optic sensors to wastewater management using microelectronics fabrication processes
Ulieru,D.Gh.
Pub. info.: Chemical, biochemical, and environmental fiber sensors IX : 16-18 June 1997, Munich, FRG.  pp.229-239,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3105
8.

Conference Proceedings
Conference Proceedings
8. New contributions to automated processing using different photoresists for microelectronics fabrication
Ulieru,D.Gh.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.666-676,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
9.

Conference Proceedings
Conference Proceedings
9. Modern concept of focused ion beam techniques for reliability analysis in VLSI manufacturing
Ulieru,D.Gh.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II.  pp.352-359,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2874