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17 results

Conference Proceedings

1. EUV characteristics of a high power and high repetition rate CO2 laser driven Xe plasma [5918-19]

Komori, H. ; Ueno, Y. ; Hoshino, H. ; Ariga, T. ; Endo, A.

Pub. info.:	Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.59180H-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5918

Conference Proceedings

2. A Study of Group Velocity Dispersion of Single-Mode Optical Waveguide Utilizing Siloxane Polymer

Ueno, Y. ; Kaneko, K. ; Tanahashi, S.

Pub. info.:	Organic nonlinear optical materials and devices : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.45-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	561

Conference Proceedings

3. Step and repeat UV-nanoimprint lithography using a large area stamp

Soumagne, G. ; Abe, T. ; Suganuma, T. ; Imai, Y. ; Someya, H. ; Hoshino, H. ; Nakano, M. ; Komori, H. ; Takabayashi, Y. ; Ariga, T. ; Ueno, Y. ; Wada, Y. ; Endo, A. ; Toyoda, K.

Pub. info.:	Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.227-235, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5751

Conference Proceedings

4. A possibility of block-copolymer templated mesoporous silica films applied to surface photo voltage (SPV) type NOx gas sensor

Yamada, T. ; Zhou, H. S. ; Uchida, H. ; Tomita, M. ; Ueno, Y. ; Katsube, Y. ; Honma, I.

Pub. info.:	Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002. pp.783-786, 2003. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	146

Technical Paper

5. Study of Alternative Oxygen Reduction Electrocatalyst for Pt Based on Transition Metal Chalcogenides.

Ueno, Y. ; Iisaka, H. ; Dohmae, K.

Pub. info.:	2008 SAE world congress : technical paper. 2008. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2008

Technical Paper

6. Two-dimensional Visualization of Premixed Hydrogen-Oxygen High Temperature Flame

Oyama, H. ; Ueno, Y. ; Kitagawa, K. ; Omasa, R.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.:	2nd

Technical Paper

7. Evaluation Method for Pressure Loss using Energy Dissipation.

Komura, K. ; Murai, K. ; Yoshikawa, A. ; Ueno, Y. ; Ibrahim, M.K. ; Nakamura, Y.

Pub. info.:	2008 SAE world congress : technical paper. 2008. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2008

Conference Proceedings

8. Development of C02 laser produced Xe plasma EUV light source for microlithography [6151-27]

Mizoguchi, H. ; Endo, A. ; Arigo, T. ; Miura, T. ; Hoshino, H. ; Ueno, Y. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Abe, T. ; Suganuma, T. ; Soumagne, G. ; Someya, H. ; Takabayashi, Y. ; Toyoda, K.

Pub. info.:	Emerging Lithographic Technologies X. pp.61510S-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6151

Conference Proceedings

9. Use of tin as a plasma source material for high conversion efficiency

Tomie, T. ; Aota, T. ; Ueno, Y. ; Niimi, G. ; Yashiro, H. ; Lin, J. ; Matsushima, I. ; Komiyama, K. ; Lee, D.H. ; Nishigori, K. ; Yokota, H.

Pub. info.:	Emerging Lithographic Technologies VII. 1 pp.147-155, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5037

10.

Conference Proceedings

10. Development of a 5-kHz ultra-line-narrowed F2 laser for dioptric projection systems

Ariga, T. ; Watanabe, H. ; Kumazaki, T. ; Kitatochi, N. ; Sasano, K. ; Ueno, Y. ; Konishi, M. ; Suganuma, T. ; Nakano, M. ; Yamashita, T. ; Nishisaka, T. ; Nohdomi, R. ; Hotta, K. ; Mizoguchi, H. ; Nakao, K.

Pub. info.:	Optical Microlithography XV. Part One pp.652-659, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

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Author: Ueno, Y.