1.

Conference Proceedings
Conference Proceedings
1. Thermoradiation modification of characteristics of silicon diffusion diodes
Makhkamov,Sh. ; Tursunov,N.A. ; Ashurov,M. ; Khakimov,Z.M.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.228-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
2.

Conference Proceedings
Conference Proceedings
2. Increasing degree of homogeneity of homogeneity of electrical parameters of neutron-transmuted silicon
Makhkamov,Sh. ; Tursunov,N.A. ; Ashurov,M. ; Khakimov,Z.M.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.287-290,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181