1.

Conference Proceedings
Conference Proceedings
1. Ion sputter deposition of shape memory alloy films for microactuators
Davies,S.T. ; Tsuchiya,K.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.160-167,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
2.

Conference Proceedings
Conference Proceedings
2. Performance of cell-shift defect inspection technique
Morikawa,Y. ; Ogawa,T. ; Tsuchiya,K. ; Noguchi,S. ; Nakashima,K.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.404-414,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
3.

Conference Proceedings
Conference Proceedings
3. Properties of βFeSi2 by first principles calculations
Yoshida,A. ; Tsuchiya,K. ; Wakahara,A.
Pub. info.: Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings.  pp.164-167,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4086
4.

Conference Proceedings
Conference Proceedings
4. Microwork transfer system in a nanomanufacturing world
Tsuchiya,K. ; Nakao,M. ; Okusa,T. ; Hatamura,Y. ; Matsumoto,K.
Pub. info.: Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania.  pp.147-156,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3202
5.

Conference Proceedings
Conference Proceedings
5. Ion beam sputter deposition of TiNi shape memory alloy thin films
Davies,S.T. ; Tsuchiya,K.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.165-172,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
6.

Conference Proceedings
Conference Proceedings
6. Occurrence of ferromagnetic shape memory alloys
Wuttig,M.R. ; Tsuchiya,K. ; James,R.D.
Pub. info.: Smart structures and materials 2000 : Active materials : behavior and mechanics : 6-9 March, 2000, Newport Beach, USA.  pp.40-44,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3992
7.

Conference Proceedings
Conference Proceedings
7. Mechanical alloying of fullerene with various metal elements
Umemoto,M. ; Masuyama,K. ; Tsuchiya,K.
Pub. info.: Mechanically alloyed, metastable and nanocrystalline materials : ISMANAM-97 : proceedings of the International Symposium held in Sitges(Barcelona), Spain, August/September 1997.  Part1  pp.31-36,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 269-272
8.

Conference Proceedings
Conference Proceedings
8. Microassembly and microbonding in Nano Manufacturing World
Tsuchiya,K. ; Murakami,A. ; Fortmann,G. ; Nakao,M. ; Hatamura,Y.
Pub. info.: Microrobotics and microassembly : 21-22 September 1999, Boston, Massachusetts.  pp.132-140,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3834
9.

Conference Proceedings
Conference Proceedings
9. Growth and characterization of shape memory alloy thin films for micropositioning and microactuation
Davies,T. ; Tsuchiya,K.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.174-182,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
10.

Conference Proceedings
Conference Proceedings
10. Fabrication of microstructures by ion beam micromachining
Davies,S.T. ; Hayton,D.A. ; Tsuchiya,K.
Pub. info.: Microlithography and Metrology in Micromachining II.  pp.248-255,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2880