1.

Conference Proceedings
Conference Proceedings
1. Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system
Inoue,H. ; Okuda,K. ; Nomura,T. ; Tsuchiya,H. ; Tabata,M.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.462-469,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. New die-to-database mask inspection system with i-line optics for 256-Mb and 1-Gb DRAMs
Tabata,M. ; Yamashita,K. ; Tsuchiya,H. ; Nomura,T. ; Inoue,H. ; Watanabe,T. ; Tojo,T. ; Yoshino,H.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.415-422,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
3.

Conference Proceedings
Conference Proceedings
3. High-resolution DUV inspection system for 150-nm generation masks
Tabata,M. ; Tsuchiya,H. ; Sanada,Y. ; Nishizaka,T. ; Hirazawa,H. ; Kobayashi,N. ; Nagai,H. ; Watanabe,T. ; Oohashi,K. ; Inoue,H. ; Nomura,T. ; Ono,A.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.138-146,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings
Conference Proceedings
4. Half-tone PSM inspection sensitivity of 257-nm light source MC-3000
Tsuchiya,H. ; Yamashita,K. ; Sugihara,S. ; Fujiwara,T. ; Yoshikawa,R.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.768-775,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
5.

Conference Proceedings
Conference Proceedings
5. Gray map reference pattern generator of a die-to-database mask inspection system for 256-Mb and 1-Gb DRAMs
Tsuchiya,H. ; Isomura,I. ; Watanabe,T. ; Yamashita,K.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.544-551,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
6.

Conference Proceedings
Conference Proceedings
6. Growth of high-quality cubic GaN on (001) GaAs by halide VPE with backside buffer
Hasegawa,F. ; Tsuchiya,H. ; Sunaba,K. ; Suemasu,T.
Pub. info.: Optoelectronic Materials and Devices.  pp.20-26,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3419