1.

Conference Proceedings
Conference Proceedings
1. Improvement in the Characteristics of Post-CMP Low-k Methylsilsesquioxane(MSQ)
Chrang, T.-C. ; Liu, P.-T. ; Huang, M.-C. ; Tsai, T.-M. ; Hsu, K.-C. ; Yang, Y.-L. ; Sze, S.M. ; Chung, H. ; Hou, J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.114-132,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
2.

Conference Proceedings
Conference Proceedings
2. Ammonia Plasma Passivation Effects on Properties of Post-CMP Low-k Hydrogen Silsesquioxane (HSQ)
Chang, T.-C. ; Liu, P.-T. ; Tsai, T.-M. ; Chang, C.-F. ; Yang, Y.-L. ; Sze, S.M. ; Shih, F.Y. ; Tsai, E. ; Chen, G. ; Lee, J.K.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.133-143,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5