1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF SURFACE IRON ON GATE OXIDE INTEGRITY AND ITS REMOVAL FROM SILICON SURFACES
Park, Heungsoo ; Helms, C. R. ; Ko, Daehong ; Tran, M. ; Triplett, B. B.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.353-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
2.

Conference Proceedings
Conference Proceedings
2. Iron Deposition from SC-1 on Silicon Wafer Surfaces
Dhanda, S. ; Helms, C. R. ; Gupta, P. ("Kim") ; Triplett, B. B. ; Tran, M.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.201-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386