1.

Conference Proceedings
Conference Proceedings
1. Advances in graft polymerization lithography
Brodsky,C.J. ; Trinque,B.C. ; Johnson,H.F. ; Willson,C.G.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.415-426,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Resist materials for 157-nm microlithography: an update
Willson,C.G. ; Tran,H.V. ; Trinque,B.C. ; Chiba,T. ; Yamada,S. ; Sanders,D.P. ; Connor,E.F. ; Grubbs,R.H. ; Klopp,J.M. ; Frechet,J.M.J. ; Thomas,B.H. ; Shafer,G.J. ; DesMarteau,D.D. ; Conley,W. ; Willson,C.G.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.385-395,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345