1.

Conference Proceedings
Conference Proceedings
1. 0.25-ｦﾌm logic manufacturability using practical 2D optical proximity correction
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Copper metallization for on-chip interconnects
Gelatos,A.V. ; Nguyen,B.-Y. ; Perry,K.A. ; Marsh,R. ; Peschke,J. ; Filipiak,S. ; Travis,E.O. ; Thompson,M.A. ; Saaranen,T. ; Tobin,P.J. ; Mogab,C.J.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.346-357,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875