1.

Conference Proceedings
Conference Proceedings
1. Processing Damage and Electrical Performance of Porous Dielectrics in Narrow Spaced Interconnects
Iacopi, F. ; Travaly, Y. ; Stucchi, M. ; Struyf, H. ; Peeters, S. ; Jonckheere, R. ; Leunissen, L.H.A. ; Tokei, Zs. ; Sutcliffe, V. ; Richard, O. ; Hove, M.Van ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.19-24,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
2.

Conference Proceedings
Conference Proceedings
2. Porosity and Critical Properties of Silica-Based Low-Dielectric-Constant Materials
Baklanov, M.R. ; Travaly, Y. ; Le, Q.T. ; Shamiryan, D. ; Vanhaelemeersch, S.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.179-198,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01