1.

Conference Proceedings
Conference Proceedings
1. Study of acid transport using IR spectroscopy and SEM
Stewart,M.D. ; Somervell,M.H. ; Tran,H.V. ; Postnikov,S.V. ; Willson,C.G.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.665-674,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
2.

Conference Proceedings
Conference Proceedings
2. Resist materials for 157-nm microlithography: an update
Willson,C.G. ; Tran,H.V. ; Trinque,B.C. ; Chiba,T. ; Yamada,S. ; Sanders,D.P. ; Connor,E.F. ; Grubbs,R.H. ; Klopp,J.M. ; Frechet,J.M.J. ; Thomas,B.H. ; Shafer,G.J. ; DesMarteau,D.D. ; Conley,W. ; Willson,C.G.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.385-395,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
3.

Conference Proceedings
Conference Proceedings
3. Top surface imaging at 157 nm
Jamieson,A. ; Somervell,M.H. ; Tran,H.V. ; Huang,R.J. ; MacDonald,S.A. ; Willson,C.G.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.406-416,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345