1.
Conference Proceedings |
Tran,A. ; Schmidt,M.R. ; Farnsworth,J.N. ; Yan,P.-Y.
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2.
Conference Proceedings |
Yan,P. ; Tran,A. ; Schmidt,M.R.
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3.
Conference Proceedings |
3. Critical dimension photomask metrology tool requirements for 0.25-ヲフm and future microlithography
Schmidt,M. ; Tran,A.
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4.
Conference Proceedings |
Kubby,J.A. ; Calamita,J. ; Chang,J. ; Chen,J. ; Gulvin,P. ; Lin,C.-C. ; Lofthus,R. ; Nowak,B. ; Su,Y. ; Tran,A. ; Burns,D. ; Bryzek,J. ; Gilbert,J. ; Hsu,C. ; Korsmeyer,T. ; Morris,A.S. ; Plowman,T.E. ; Rabinovich,V.L. ; Daiber,T.D. ; Scharf,B.R.
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