1.

Conference Proceedings
Conference Proceedings
1. Feasibility study of manufacturing process and quality control for the new alternatingPSM structure (BACUS Best Poster)
Morikawa, Y. ; Kokubo, H. ; Nishiguchi, M. ; Nara, M. ; Totsu, Y. ; Hoga, M. ; Hayashi, N.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.224-234,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
2.

Conference Proceedings
Conference Proceedings
2. Defect printability analysis on alternating phase-shifting masks for 193-nm lithography
Morikawa, Y. ; Totsu, Y. ; Nishiguchi, M. ; Hoga, M. ; Hayashi, N. ; Pang, L. ; Luk-Pat, G.T.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.922-934,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889