1.

Conference Proceedings
Conference Proceedings
1. RET-compliant cell generation for sub-130-nm processes
Torres, J.A. ; Chow, D. ; de Dood, P. ; Albers, D.J.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.529-539,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Design verification flow for model-assisted double-dipole decomposition
Torres, J.A. ; Schellenberg, F.M. ; Toublan, O.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.585-592,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
3.

Conference Proceedings
Conference Proceedings
3. Model-assisted placement of subresolution assist features: experimental results
Brist, T.E. ; Torres, J.A.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.99-106,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
4.

Conference Proceedings
Conference Proceedings
4. Printability of hard and soft defects in 193-nm lithography
Philipsen, V. ; Jonckheere, R.M. ; Kohlpoth S. ; Friedrich, C.M. ; Torres, J.A.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.95-111,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
5.

Conference Proceedings
Conference Proceedings
5. Alternatives to alternating phase-shift masks for 65 nm
Torres, J.A. ; Maurer, W.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.540-550,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
6.

Conference Proceedings
Conference Proceedings
6. Model-assisted double dipole decomposition
Torres, J.A. ; Schellenberg, F.M. ; Toublan, O.
Pub. info.: Optical Microlithography XV.  Part One  pp.407-417,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
7.

Conference Proceedings
Conference Proceedings
7. Contrast-based assist feature optimization
Torres, J.A. ; Granik, Y. ; Capodieci, L.
Pub. info.: Optical Microlithography XV.  Part One  pp.179-187,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
8.

Conference Proceedings
Conference Proceedings
8. Calibration of OPC models for multiple focus conditions
Schacht, J. ; Herold, K. ; Zimmermann, R. ; Torres, J.A. ; Maurer, W. ; Granik, Y. ; Chang, C.-H. ; Hung, G.K.-C. ; Lin, B.S.-M.
Pub. info.: Optical Microlithography XVII.  pp.691-702,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377