1.
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Conference Proceedings
|
Schreiber,H. ; Dewa,P.G. ; Dunn,M.M. ; Hordin,R. ; Mack,S.K. ; Statt,B.D. ; Tompkins,P.J.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.1095-1106, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
2.
|
Conference Proceedings
|
Statt,B.D. ; Dewa,P.G. ; Mack,S.K. ; Schreiber,H. ; Stone,B.D. ; Tompkins,P.J.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.1107-1114, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|