1.

Conference Proceedings
Conference Proceedings
1. Contrast enhancement by alkali-decomposable additives in quinonediazide-type positive resists
Uetani,Y. ; Tomioka,J. ; Moriuma,H. ; Miya,Y.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1280-1287,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings
Conference Proceedings
2. Effect of Shape of Crystal-Melt Interface on Point Defect Reaction in Silicon Crystals
Nakamura,K. ; Maeda,S. ; Togawa,S. ; Saishoji,T. ; Tomioka,J.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.31-43,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218
3.

Conference Proceedings
Conference Proceedings
3. The Formation Mechanism of Coupled Voids in Czochralski Silicon
Ishikawa,F. ; Sadohara,S. ; Saishoji,T. ; Nakamura,K. ; Tomioka,J.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.86-96,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218