1.

Technical Paper

Technical Paper
Tani, K. ; Kanda, T. ; Tokutome, S.
Pub. info.: AIAA meeting papers on disc.  2005.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 43rd
2.

Conference Proceedings

Conference Proceedings
Hashimoto, K. ; Kuji, T. ; Tokutome, S. ; Kotani, T. ; Tanaka, S. ; Inoue, S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1070-1081,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691