Tokuda, K.L. ; Kisker, D.W. ; Lamont-Schnoes, M. ; Lopata, J.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.111-116, 1991. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.239-244, 1989. Pittsburgh, Pa.. Materials Research Society