1.

Conference Proceedings
Conference Proceedings
1. Copper metallization for on-chip interconnects
Gelatos,A.V. ; Nguyen,B.-Y. ; Perry,K.A. ; Marsh,R. ; Peschke,J. ; Filipiak,S. ; Travis,E.O. ; Thompson,M.A. ; Saaranen,T. ; Tobin,P.J. ; Mogab,C.J.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.346-357,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875
2.

Conference Proceedings
Conference Proceedings
2. Metal gates for advanced CMOS technology
Maiti,B. ; Tobin,P.J.
Pub. info.: Microelectronic Device Technology III.  pp.46-57,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881