1.

Conference Proceedings
Conference Proceedings
1. 43. Roadblocks and detours for poly-silicon / metal-oxide MOS integration
Gilmer, D.C. ; Hobbs, C. ; Grant, J. ; Hegde, R. ; Tseng, H. ; Triyoso, D. ; Roan, D. ; Cotton, R. ; Smith, J ; Dhandapani, V ; Garcia, R. ; Dip, L. ; Rai, R. ; Conner, J ; Samavedam, S. ; Taylor, B. ; Tobin, P.J.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.345-360,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings
Conference Proceedings
2. Impact of Lanthanide Contamination on ULSI CMOS
Taylor, W. ; Lovejoy, L. ; Tobin, P.J. ; Jiang, Z.X. ; Lerma, J. ; Nguyen, J.-Y. ; Garcia, R.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.297-306,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
3.

Conference Proceedings
Conference Proceedings
3. MICROSTRUCTURE AND INTEGRITY OF THIN SILICON FILMS ON SiO2 AFTER IMMERSION IN 10:1 BUFFERED HF
Hegde, R.I. ; Chonko, M.A. ; Tobin, P.J.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.1037-1042,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
4.

Conference Proceedings
Conference Proceedings
4. Evaluation Of Candidate Metals For Dual-Metal Gate Cmos With Hfo_2 Gate Dielectric
Samavedam, S.B. ; Schaeffer, J.K. ; Gilmer, D.C. ; Dhandapani, V. ; Tobin, P.J. ; Mogab, J. ; Nguyen, B-Y. ; Dakshina-Murthy, S. ; Rai, R.S. ; Jiang, Z-X. ; Martin, R. ; Raymond, M.V. ; Zavala, M. ; La, L.B. ; Smith, J.A. ; Gregory, R.B.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.85-90,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
5.

Conference Proceedings
Conference Proceedings
5. Overgated Thin Film Transistor for SRAM Load Devices
Nguyen, B.Y. ; Tobin, P.J. ; McNelly, T.F. ; Hayden, J.D. ; Breaux, L. ; Hegde, R.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.316-325,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35