1.

Conference Proceedings
Conference Proceedings
1. Surface Roughness Evaluation of CVD Doped Oxide Films for Advanced Deep Sub-Micron Semiconductor Applications
Ilg, M. ; Ploessl, R. ; Stuber, J. ; Conti, R. ; Cote, D. ; Gambino, J. ; Tobben, D. ; Kirchoff, M.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.749-755,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Influence of the Cure Process on the Properties of Hydrogen Silsequioxane Spin-on Glass
Tobben, D. ; Weigand, P. ; Shapiro, M. J. ; Cohen, S. A.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.195-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443