Optomechanical engineering and vibration control : 20-23 July 1999, Denver, Colorado. pp.402-412, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.242-250, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micro-optical technologies for measurement, sensors, and microsystems : 12-13 June 1996, Besançon, France. pp.105-116, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania. pp.117-127, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optomechanical engineering and vibration control : 20-23 July 1999, Denver, Colorado. pp.534-544, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Specification, Production, and Testing of Optical Components and Systems. Part2 pp.522-528, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering