1.

Conference Proceedings
Conference Proceedings
1. MECHANICAL PARAMETER EXTRACTION USING RESONANT STRUCTURES
Elders, J. ; Tilmans, H. A. C. ; Bouwstra, S. ; Elwenspoek, M.
Pub. info.: Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.171-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 308
2.

Conference Proceedings
Conference Proceedings
2. A surface-micromachined tunable film bulk acoustic resonator
Pan, W. ; Soussan, P. ; Nauwelaers, B. ; Tilmans, H. A. C.
Pub. info.: MEMS, MOEMS, and Micromachining.  pp.166-173,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5455
3.

Conference Proceedings
Conference Proceedings
3. Piezoelectric actuation for application in RF MEMS switches
Klaasse, G. ; Puers, B. ; Tilmans, H. A. C.
Pub. info.: MEMS, MOEMS, and Micromachining.  pp.174-180,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5455