Hauschildt, M. ; Gall, M. ; Thrasher, S. ; Justison, P. ; Michaelson, L. ; Hernandez, R. ; Kawasaki, H. ; Ho, P.S.
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.379-384, 2004. Warrendale. Materials Research Society