1.

Conference Proceedings

Conference Proceedings
Klein,R. ; Gottwald,A. ; Scholze,F. ; Thornagel,R. ; Tummler,J. ; Ulm,G. ; Wedowski,M. ; Stietz,F. ; Mertens,B. ; Koster,N.B. ; Elp,J.van
Pub. info.: Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA.  pp.105-112,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4506
2.

Conference Proceedings

Conference Proceedings
Bautz,M.W. ; Pivovaroff,M.J. ; Kissel,S.E. ; Prigozhin,G.Y. ; Isobe,T. ; Jones,S.E. ; Ricker,G.R. ; Thornagel,R. ; Kraft,S. ; Scholze,F. ; Ulm,G.
Pub. info.: X-ray optics, instruments, and missions III : 27-29 March 2000, Munich, Germany.  pp.53-67,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4012
3.

Conference Proceedings

Conference Proceedings
Kraft,S. ; Scholze,F. ; Thornagel,R. ; Ulm,G. ; McDermott,W. C. ; Kellogg,E. M.
Pub. info.: EUV, X-ray, and gamma-ray instrumentation for astronomy VIII : 30 July - 1 August 1997, San Diego, California, Oswald H. W. Siegmund, Mark A. Gummin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.  pp.101-112,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3114
4.

Conference Proceedings

Conference Proceedings
McDermott,W.C. ; Kellogg,E.M. ; Wargelin,B.J. ; Evans,I.N. ; Vitek,S.A. ; Tsiang,E.Y. ; Schwartz,D.A. ; Edgar,R.J. ; Kraft,S. ; Scholze,F. ; Thornagel,R. ; Ulm,G. ; Weisskopf,M.C. ; O'Dell,S.L. ; Tennant,A.F. ; Kolodziejczak,J.J. ; Zirnstein,G.
Pub. info.: Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California.  pp.535-543,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3113
5.

Conference Proceedings

Conference Proceedings
Scholze,F. ; Beckhoff,B. ; Brandt,G. ; Fliegauf,R. ; Gottwald,A. ; Klein,R. ; Meyer,B. ; Schwarz,U.D. ; Thornagel,R. ; Tummler,J. ; Vogel,K. ; Weser,J. ; Ulm,G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.402-413,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344