1.

Conference Proceedings
Conference Proceedings
1. The Necessity of RTCVD in Advanced Epitaxial Growth of Si and SiGe
Boer, W. B. de ; Theunissen, M. J. J. ; Linden, R. H. J. Van Der
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.287-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
2.

Conference Proceedings
Conference Proceedings
2. Defects and Diffusion in Silicon An Overview
Cowern, N. E. B. ; Mannino, G. ; Stolk, P. A. ; Theunissen, M. J. J.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.79-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568