1.

Conference Proceedings
Conference Proceedings
1. STUDIES OF SiH2Cl2/H2 GAS PHASE CHEMISTRY FOR SELECTIVE THIN FILM GROWTH OF CRYSTALLINE SILICON, c-Si, USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Theil, J.A. ; Lucovsky, G. ; Hattangady, S.V. ; Fountain, G.G. ; Markunas, R.J.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.601-612,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. FORMATION OF MULTILAYER SiO2-SiOx HETEROSTRUCTURES BY CONTROL OF REACTION PATHWAYS IN REMOTE PECVD
Tsu, D.V. ; Kim, S.S. ; Theil, J.A. ; Wang, Cheng ; Lucovsky, G.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.209-214,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
3.

Conference Proceedings
Conference Proceedings
3. Nanocrystal formation in thermally oxidized and annealed a-Si:H films and SiOxNy films (x=0.17; y=0.07)
Kohli, S. ; Theil, J.A. ; Snyder, R.D. ; Rithner, C.D. ; Dorhout, P.K.
Pub. info.: Nanomaterials and Their Optical Applications.  pp.8-16,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5224