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19 results

Conference Proceedings

1. X-RAY DOUBLE CRYSTAL ANALYSIS OF STRUCTURE AND STRESS RELAXATION IN SOLID PHASE EPITAXIAL CaF2 AND Ge/CaF2 FILMS ON (111) Si BY IN SITU RAPID ISOTHERMAL PROCESSING

Chaudhuri, J. ; Hashmi, F. ; Singh, R. ; Thakur, R. P. S.

Pub. info.:	Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.199-206, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	221

Conference Proceedings

2. ROLE OF IN-SITU RAPID ISOTHERMAL PROCESSING (RIP) IN THE METALLIZATION AND PASSIVATION OF INDIUM PHOSPHIDE DEVICES

Singh, R. ; Thakur, R. P. S. ; katz, A. ; Nelson, A. J.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.423-428, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

3. Enabling Thermal Processing of High- and Low-Dielectric-Constant Materials

Thakur, R. P. S. ; DeBoer, S. J. ; Singh, R.

Pub. info.:	Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.369-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	470

Conference Proceedings

4. Integrated Rapid Thermal CVD Processing Solutions For 0.18-0.25 ｦﾌm Technologies

Gilboa, H. ; Gilboa, Y. E. ; Atzmon, Z. ; Levy, S. ; Spilberg, H. ; Bransky, E. ; Doitel, Z. ; Thakur, R. P. S. ; Weimer, R. A. ; DeBoer, S. ; Pan, J.

Pub. info.:	Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.215-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	470

Conference Proceedings

5. High-Performance High-Dielectric-Constant Films Deposited by Dual Spectral Source Rapid Isothermal-Assisted Metalorganic Chemical Vapor Deposition (MOCVD)

Chen, Y. ; Singh, R. ; DeBoer, S. ; Thakur, R. P. S.

Pub. info.:	Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.133-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	470

Conference Proceedings

6. Rapid Thermal Processing-Manufacturing Perspective

Thakur, R. P. S. ; Schuegraf, K. ; Fazan, P. ; Rhodes, H. ; Zahorik, R.

Pub. info.:	Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.187-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	387

Conference Proceedings

7. ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING

Nagabushnam, V. ; Singh, R. K. ; Thakur, R. P. S.

Pub. info.:	Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.389-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	342

Conference Proceedings

8. ADVANCED DRAM CELL DIELECTRIC FILMS USING RAPID THERMAL PROCESSING

Thakur, R. P. S. ; Mathews, V. K. ; Fazan, P. C.

Pub. info.:	Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.305-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	342

Conference Proceedings

9. IMPORTANCE OF THE PHOTOEFFECTS IN RAPID ISOTHERMAL PROCESSING (RIP)

Singh, R. ; Mavoori, J. ; Thakur, R. P. S. ; Narayanan, S.

Pub. info.:	Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.437-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	342

10.

Conference Proceedings

10. Growth and Characterization of Thin Wet Oxides Grown by Rapid Thermal Processing

Sharangpani, R. ; Das, J. ; Tay, S. P. ; Thakur, R. P. S. ; Yang, T. C. ; Saraswat, K. C.

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.143-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

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