1.

Conference Proceedings
Conference Proceedings
1. (11.2) 3:40 - 4:00 PM - Formation Mechanism of Ge-on-lnsulator Layers by Ge-condensation Technique
Nakaharai, S. ; Tezuka, T. ; Sugiyama, N. ; Takagi, S. (MIRAI ASET)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.741-748,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07
2.

Conference Proceedings
Conference Proceedings
2. High performance strained-SOl CMOSFETs
Takagi, S-I. ; Mizuno, T. ; Tezuka, T. ; Sugiyama, N ; Numata, T. ; Usuda, K. ; Monyama, Y. ; Nakaharai, S. ; Koga, J. ; Tanabe, A. ; Maeda, T.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.159-174,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5
3.

Conference Proceedings
Conference Proceedings
3. High Performance Strained-SOI CMOSFETs*
Takagi, S.-I. ; Mizuno, T. ; Tezuka, T. ; Sugiyania, N. ; Numata, T. ; Usuda, K. ; Moriyama, Y. ; Nakaharai, S. ; Koga, J. ; Tanabe, A. ; Macda, T.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.518-533,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
4.

Conference Proceedings
Conference Proceedings
4. A new on-machine measurement system to measure wavefront aberrations of projection optics with hyper-NA [6154-77]
Ohsaki, Y. ; Mori, T. ; Koga, S. ; Ando, M. ; Yamamoto, K. ; Tezuka, T. ; Shiode, Y.
Pub. info.: Optical Microlithography XIX.  pp.615424-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154