Poirier, I. ; Wang, Y.B. ; Ducarroir, M. ; Teyssandier, F.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.425-432, 1997. Pennington, NJ. Electrochemical Society
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.108-115, 2001. Pennington, N.J.. Electrochemical Society
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.313-318, 1998. Pennington, NJ. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.15-22, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.111-116, 1998. Pennington, NJ. Electrochemical Society
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.17-24, 2001. Pennington, N.J.. Electrochemical Society