1.

Conference Proceedings
Conference Proceedings
1. Low Power and High Speed Hf-based Gated CMOS FET with Dual Poly-Si Gate Electrodes (Invited paper)
Iwamoto, T. ; Ogura, T. ; Terai, M. ; Morioka, A. ; Saitoh, M. ; Kimizuka, N. ; Yasuda, Y. ; Imai, K. ; Fujieda, S. ; Watanabe, H.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.143-154,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings
Conference Proceedings
2. Below 70-nm contact hole pattern with RELACS process on ArF resist
Terai, M. ; Toyoshima, T. ; Ishibashi, T. ; Tarutani, S. ; Takahashi, K. ; Takano, Y. ; Tanaka, H.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.789-797,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039