1.

Conference Proceedings
Conference Proceedings
1. Developing a method to determine linewidth based on counting the atom spacings across a line
Silver,R.M. ; Jensen,C.P. ; Tsai,V.W. ; Fu,J. ; Villarrubia,J.S. ; Teague,E.C.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.441-460,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Grating pitch measurements with the molecular measuring machine
Kramar,J. ; Jun,J.S. ; Penzes,W.B. ; Scire,F. ; Teague,E.C. ; Villarrubia,J.S.
Pub. info.: Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado.  pp.46-53,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3806
3.

Conference Proceedings
Conference Proceedings
3. 1/N Feynman machines as a path to ultraminiaturization
Teague,E.C.
Pub. info.: Microlithography and Metrology in Micromachining.  pp.82-88,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640