Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.3-19, 1993. Pennington, NJ. Electrochemical Society
Nayak, P. ; Kurien, J. ; Dorais, G. ; Millar, W. ; Rajan, K. ; Kanefsky, R. ; Bernard, D.E. ; Gamble, E.B., Jr. ; Rouquette, N. ; Smith, B.D. ; Tung, Y-W. ; Muscoletta, N. ; Taylor, W.
Pub. info.:
iSAIRAS '99 : Fifth International Symposium on Artificial Intelligence, Robotics and Automation in Space, ESTEC, Noordwijk, the Netherlands, 1-3 June 1999. pp.349-356, 1999. Noordwijk, Netherlands. ESA Publications Division