1.

Conference Proceedings
Conference Proceedings
1. GAS SOURCE SILICON MOLECULAR BEAM EPITAXY
Hirayama, H. ; Hiroi, M. ; Koyama, K. ; Tatsumi, T. ; Sato, M.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.545-556,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Changes of chemical nature of photoresists induced by various plasma treatments and their impact on LWR [6153-46]
Kawahira, H. ; Matsuzawa, N. N. ; Matsui, E. ; Ando, A. ; Salam, K. M. A. ; Yoshida, M. ; Yamaguchi, Y. ; Kugimiya, K. ; Tatsumi, T. ; Nakano, H. ; Iwai, T. ; Irie, M.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.615319-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
3.

Conference Proceedings
Conference Proceedings
3. Carbon monoxide hydrogenation catalyzed by zeolite-supported ruthenium carbonyl clusters in the presence of methyl iodide
Tatsumi, T. ; Odajima, H. ; Yamaguchi, K. ; Tominaga, H.
Pub. info.: Zeolites : facts, figures, future : proceedings of the 8th International Zeolite Conference, Amsterdam, The Netherlands, July 10-14, 1989.  Part B  pp.1301-,  1989.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 49
4.

Conference Proceedings
Conference Proceedings
4. Hydrodesulfurization of Benzothiophene Catalyzed by Molybdenum Sulfide Cluster Encapsulated into Zeolites
Taniguchi, M. ; Yasuda, S. ; Ishii, Y. ; Murata, T. ; Hidai, M. ; Tatsumi, T.
Pub. info.: 11th International Congress on Catalysis, 40th anniversary : Proceedings of the 11th ICC, Baltimore, MD, USA, June 30-July 5, 1996.  Part A  pp.107-,  1996.  New York.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 101
5.

Conference Proceedings
Conference Proceedings
5. Rate-Limiting Step of SiO2 Etching Reaction in Fluorocarbon Plasma Investigated by Electron Spin Resonance and X-Ray Photoelectron Spectroscopy
OkigaWa, M. ; Matsui, M. ; Tatsumi, T. ; Sekine, M.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.99-104,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
6.

Conference Proceedings
Conference Proceedings
6. INVITED: Si AND SiGe SELECTIVE EPITAXIAL GROWTH BY UHV-CVD
Tatsumi, T. ; Aoyama, K.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.798-811,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
7.

Conference Proceedings
Conference Proceedings
7. Plasma Technologies for Low-k Dry Etching*
Tatsumi, T.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.206-216,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
8.

Conference Proceedings
Conference Proceedings
8. Photochemical properties of rhodamine-B dye molecules included within mesoporous molecular sieves
Yamashita, H. ; Tanaka, A. ; Nishimura, M. ; Koyano, K. ; Tatsumi, T. ; Anpo, M.
Pub. info.: Mesoporous molecular sieves 1998 : proceedings of the first international symposium, Baltimore, MD, U.S.A., July 10-12, 1998.  pp.551-,  1998.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 117
9.

Conference Proceedings
Conference Proceedings
9. Selective conversion of syngas to hydrocarbons by zeolites
Tominaga, H. ; Fujimoto, K. ; Tatsumi, T.
Pub. info.: Catalysis and adsorption by zeolites : proceedings of ZEOCAT 90, Leipzig, August 20-23, 1990.  pp.203-,  1991.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 65
10.

Conference Proceedings
Conference Proceedings
10. Stabilization of M41S materials by trimethylsilylation
Tatsumi, T. ; Koyano, K. A. ; Tanaka, Y. ; Nakata, S.
Pub. info.: Mesoporous molecular sieves 1998 : proceedings of the first international symposium, Baltimore, MD, U.S.A., July 10-12, 1998.  pp.143-,  1998.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 117