1.

Conference Proceedings
Conference Proceedings
1. Formation of Ultra-Thin Silicon Oxynitride Films by Low-Energy Nitrogen Implantation
Diniz, J. A. ; Tatsch, P. J. ; Kretly, L. C. ; Queiroz, J. E. C. ; Fo, J. Godoy
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.249-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
2.

Conference Proceedings
Conference Proceedings
2. Deep Dry Etching of Silicon Using Bosch Type Process
Guidini, V. O. ; Moshkalyov, S. A. ; Tatsch, P. J.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.381-386,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
3.

Conference Proceedings
Conference Proceedings
3. Control of Micron and Submicron Feature Dimensions in 2um Resolution Photolithographic System for MOS and MEMS Applications
Fioravante, N. P. Jr. ; Manera, L. T. ; Moshkalyov, S. A. ; Diniz, J. A. ; Tatsch, P. J. ; Grados, H. R. J. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.369-374,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
4.

Conference Proceedings
Conference Proceedings
4. A CMOS Technology for Educational Activities and Academic Projects
Jimenez G., H. R. ; Manera, L. T. ; Camolesi, A. ; Fruett, F. ; Diniz, J. A. ; Tatsch, P. J.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.39-45,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08