1.

Technical Paper

Technical Paper
Tanaka, H ; Hitosugi, K ; Kurishige, M ; Kifuku, T.
Pub. info.: 2007 SAE world congress : technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
2.

Conference Proceedings

Conference Proceedings
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Suzuki, T. ; Matsunaga, T. ; Sakanish, S. ; Kaminishi, M. ; Watanabe, Y. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M ; Kawasuji, T ; Nogawa, H ; Umeda, H ; Taniguchi, H ; Sasaki, Y ; Kinoshita, J ; Abe T ; Tanaka, H ; Hayashi, H ; Miyao, K ; Niwano, M ; Kurosu, A ; Yashiro, M ; Nagano, H ; Igarashi, T ; Mimura, T ; Kakizaki, K
Pub. info.: Optical Microlithography XIX.  pp.615425-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154